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Inclusion of gratings

Imaging Systems

Ghost images

Diffractive lenses

Advanced PSF/MTF

Inclusion of gratings
Time: 2018-05-28 21:46Source: infocrops.comWriter: infocrops
Simulating imaging systems which include grating elements is a necessary task with practical applications: for instance, to model the behaviour of wafer inspection systems. VirtualLab Fusion facilitates the exercise through its fast physical optics approach, allowing for
 
the inclusion of gratings in high-NA systems
 
the consideration of realistic diffraction efficiencies
 
automatically taking into account vectorial effects
 
dealing with holographic optical elements and volume gratings
 
in both ray and physical optics simulations.
 

 
Optical system for inspection of micro-structured wafer
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